Key ^ | Value |
---|---|
Accuracy | 2?m |
Leadscrew Pitch | 2 mm |
Max. Speed (mm/sec) | 60 mm/sec |
Microscope type | Nikon TE2000 |
Position Feedback Option | 0.1?m Linear Encoder |
Repeatability | 0.25?m |
Resolution (minimum) | 100nm |
Stage type | Standard |
Straightness Flatness | 1?m/25mm |
Travel | 120x100mm |