| Key ^ | Value |
|---|---|
| Accuracy | 6?m |
| Leadscrew Pitch | 2 mm |
| Max. Speed (mm/sec) | 60 mm/sec |
| Microscope type | Nikon TE2000 |
| Position Feedback Option | Rotary Encoder |
| Repeatability | 0.60?m |
| Resolution (minimum) | 200nm |
| Stage type | Standard |
| Straightness Flatness | 1?m/25mm |
| Travel | 120x100mm |