| Key | Value |
|---|---|
| Feeding Method | Ball screw |
| Load Capacity (Range)(N) | 30.1~50 |
| Lost motion(?m) | 1 |
| Moment Rigidity (Yawing), In the case of a single axis(?/N?cm) | 0.08 |
| Straightness of the Movement-Single Spindle(?m) | 3 |
| Thickness H of stage surface(mm) | 30 |
| Types | X-Axis Stages |