| Key ^ | Value |
|---|---|
| Backlash(?m) | 1 |
| Feeding Method | Ball screw |
| Moment Rigidity (Pitching), In the case of a single axis(?/N?cm) | 0.08 |
| Positioning Repeatability(?dig) | 0.5 |
| Table surface finishes | Electroless Nickel Plating |
| Types | X-Axis Stages |
| Unidirectional Positioning Accuracy-Single Axis(?m) | 5 |