Attributes . parallelism . Values

+/-0.0001 in (6)   +/-0.0005 in (4)   -0.0002 in (8)   .00004"/1µm (3)   .00016" (1)   0,00012" (8)   0.000024" or less (2)   0.00008" (2)   0.00012" or less / 3&la. (1)   0.00025" (1)   0.00028" or less / 7 &m. (4)   0.00036" or less / 9 &m. (4)   0.001 in (3)   1µm/.00004" (1)   1µm or less (2)   1um or less (4)   2 µm (4)   2um or less (2)   3 µm (12)   3um or less (4)   4 µm (10)   5 µm (24)   6 µm (2)   parallelism is measured. (5)   [0.00008 + 0.00004 (L/4. (8)